发明名称 Quartz glass crucible for pulling up silicon single crystal and method for manufacture thereof
摘要 A quartz glass crucible which has a non-transparent outer layer formed through melting a natural silica powder and a transparent layer formed in the inside of the outer layer, wherein the transparent layer comprises a natural quartz layer having a thickness of 0.4 to 5.0 mm transparent layer comprising a synthetic quarts glass is formed thereon in the inside of the crucible in the range of 0.15 to 0.55 L relative to L, which is the distance from the center of the bottom of the inner surface of the quartz glass crucible to the upper end thereof along the inner surface thereof. The quartz glass crucible can be suitably used for suppressing the occurrence of vibration and reducing the generation of roughened face in the surface of a crucible, and thus for pulling up a silicon single crystal with enhanced stability.
申请公布号 US2006236916(A1) 申请公布日期 2006.10.26
申请号 US20050555853 申请日期 2005.11.01
申请人 SHIN-ETSU QUARTZ PRODUCTS CO., LTD. 发明人 OHAMA YASUO
分类号 C30B15/00;C03B19/09;C30B11/00;C30B15/10;C30B21/06;C30B27/02;C30B28/10;C30B30/04 主分类号 C30B15/00
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