| 摘要 |
PROBLEM TO BE SOLVED: To achieve, while securing the restoring force equal to conventional one, improvement in contacting force, reduction of applied voltage and/or down-sizing of electrode. SOLUTION: In the electrostatic micro-relay 10, a movable electrode 24 is driven by an electrostatic attractive force generated by applying a voltage between a fixed electrode 12 installed on a base 11 and the movable electrode 24 of an actuator 21, and an electric circuit is opened/closed by a movable contact 26 installed on the actuator 21 being contacted with/separated from fixed contacts 13a, 14a installed on the base 11. The actuator 21 is equipped with a supporting part 22 for standing the base 11, and a beam 23 extending from the supporting part 22 to the side direction and elastically supporting the movable electrode 24 and the movable contact 26. The beam 23 supports elastically the movable electrode 24 and the movable contact 26 in this order from the supporting part 22 side. A connection part 28 to connect the beam 23 and the movable electrode 24 is provided with a slit 27 formed from the supporting part 22 side. COPYRIGHT: (C)2007,JPO&INPIT
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