| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro switch that can be driven at a low voltage and at a high speed. SOLUTION: Because of having a pair of electrodes that drive a movable part with a contact by static electricity, and furthermore, because of having two pairs of the electrodes for limiting movement in a direction vertical to the driving direction, switching operation can be carried out at low voltage and at high speed by basically making the movable part float from a structure, and by making force from outside as small as possible. COPYRIGHT: (C)2007,JPO&INPIT
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