发明名称 |
CONVEY ERROR MEASURING METHOD, CALIBRATION METHOD, PLOTTING METHOD, EXPOSURE PLOTTING METHOD, PLOTTING DEVICE, AND EXPOSURE PLOTTING DEVICE |
摘要 |
<p>A plotting device includes: a first convey unit (100) for conveying a measurement work (36a) relatively to exposure heads (24a to 24h); a first plotting unit (102) for successively plotting a test pattern image (112) on the measurement work (36a) by the exposure heads (24a to 24h); a measurement unit (104) for measuring at least a relative convey error of the measurement work (36a) according to the plotting state of the test pattern images (112) plotted on the measurement work (36a); a correction unit (106) for creating information on the plotting timing and the image deformation according to the convey error; a second convey unit (108) for conveying a normal work (36) relatively to the exposure heads (24a to 24h); and a second plotting unit (110) for plotting the image to be plotted on the normal work (36) according to the information created by the correction unit (106).</p> |
申请公布号 |
WO2006112484(A1) |
申请公布日期 |
2006.10.26 |
申请号 |
WO2006JP308239 |
申请日期 |
2006.04.19 |
申请人 |
FUJI PHOTO FILM CO., LTD.;FUKUI, TAKASHI |
发明人 |
FUKUI, TAKASHI |
分类号 |
G03F7/20;G03F9/00;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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