SUBSTRATE PROCESSING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide substrate processing equipment which easily performs a wet cleaning of treatment pipe. SOLUTION: The equipment comprises: a heating means 207 for heating a substrate 200; a treatment pipe 203, in which a cross-section is profiled in roughly circle for housing the above-mentioned substrate; at least one of capillaries 232a, 232b, 275 prepared in the treatment pipe with ends projecting outside from the outer wall of the treatment pipe; a processing gas supplying system 230 supplying a processing gas inside the above-mentioned treatment pipe through at least one of the capillaries; and an exhaust system 240 exhausting an inside of the above-mentioned treatment pipe through an exhaust port 231 prepared in the above-mentioned treatment pipe. The above-mentioned capillaries and exhaust port are arranged within roughly 180°in a circumference direction of the above-mentioned treatment pipe. COPYRIGHT: (C)2007,JPO&INPIT