| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a master disk for an optical information storage medium capable of easily producing areas having different depths on one disk, and to provide a manufacturing method of a stamper for the optical information storage medium, the stamper, a manufacturing method of a molding substrate for the optical information storage medium, and the molding substrate for the optical information storage medium. SOLUTION: A photoresist layer 12 is formed on the surface of a substrate 11 for a master disk, and the disk is exposed. When a resist pattern 15 is formed after the exposure, reactive ion etching is carried out to a part exposed by the resist pattern to the whole surface of a photoresist master set to form a pattern 17. In this case, a flat mask 18 is installed on a photoresist surface so as to prevent etching to a part to be shallowed in a shallow area (first level). In this state, etching is carried out to the depth of an area to be deepened (second level). Finally, the photoresist remaining on the surface of the substrate 11 for the master disk is removed. Thus, the optical information storage medium having areas of different depths is formed easily on one disk. COPYRIGHT: (C)2007,JPO&INPIT
|
