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发明名称
摘要
申请公布号
JP3837263(B2)
申请公布日期
2006.10.25
申请号
JP19990325423
申请日期
1999.11.16
申请人
发明人
分类号
H01L27/06;H01L27/082;H01L21/8222;H03F3/45
主分类号
H01L27/06
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