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发明名称
PLASMA PROCESSING APPRATUS FOR PROCESSING FLAT PANEL DISPLAY SUBSTRATES
摘要
申请公布号
KR200429542(Y1)
申请公布日期
2006.10.24
申请号
KR20060014179U
申请日期
2006.05.26
申请人
发明人
分类号
C23C16/00
主分类号
C23C16/00
代理机构
代理人
主权项
地址
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