| 摘要 |
<p>A dual-flow valve and internal processing vessel isolation system is provided to isolate the internal purification system from gas while the gas is not drawn from a purification device. A dual-flow valve and internal processing vessel isolation system includes a valve body(9), a first valve(11), and a second valve(13). The valve body has an external port and an input terminal provided with at least a first port, a second port, and a third port. The first valve is arranged inside of the valve body to control a fluid flow between the first port and the second port. And, the second valve is arranged inside of the valve body to control the fluid flow between the third port and the external port.</p> |
