发明名称 |
Single crystalline diamond and producing method thereof |
摘要 |
The object of the present invention is to obtain a high quality single crystalline diamond that has less distortion and large area suitable for semiconductor device substrates or an optical component material. The present invention is a single crystalline diamond produced by chemical vapor deposition, wherein, when a linear polarized light which is composed of two linear polarized lights perpendicular to each other is introduced into one main face of the single crystalline diamond, a maximum value of a retardation between the two linear polarized lights perpendicular to each other which come out from an opposite main face is not more than 50 mum at maximum per a thickness of 100 mum across an entire of the single crystalline diamond, and also a method for producing the diamond.
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申请公布号 |
US2006231015(A1) |
申请公布日期 |
2006.10.19 |
申请号 |
US20060402062 |
申请日期 |
2006.04.12 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
MEGURO KIICHI;YAMAMOTO YOSHIYUKI;IMAI TAKAHIRO |
分类号 |
C30B23/00;C30B25/00;C30B28/12;C30B28/14 |
主分类号 |
C30B23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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