| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a coater capable of extending the life of a sealing member used in a liquid transfer pump. <P>SOLUTION: The coater 1 comprises: a reservoir tank 4 for reservoiring a coating solution; a stage 5 for retaining a substrate K; a nozzle 6 having a slit opening 621 and installed above the stage 5; a liquid transfer pump for introducing the coating solution in the reservoir tank 4 to the nozzle 6 by alternately performing a suction operation and a charge operation; a first open and close valve 11 which is disposed between a suction opening C12 of the liquid transfer pump and the reservoir tank 4, and which is in an open state during the suction operation and in a close state during the discharge operation; a second open and close valve 12 which is disposed between a discharge opening C13 of the liquid transfer pump and the nozzle 6, and which is in an open state during the discharge operation and in a close state during the suction operation; and a driving means 7 for relatively moving the nozzle 6 and the substrate K with the slit opening 621 and the substrate K adjacent to each other, wherein the liquid transfer pump includes a film sealing member F for sealing a gap G between a cylinder C and a plunger P. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
