发明名称 ESD protection device with thick poly film and method for forming the same
摘要 An ESD protection device with thicker polysilicon film, an electronic apparatus having the same, and a method for manufacturing the same are provided. The ESD protection device can be a diode or a MOS transistor with a thicker polysilicon film employed in an ESD protection circuit to protect an electronic apparatus. The electronic apparatus includes a substrate having a device area and an ESD protection circuit area. A first polysilicon film of a first thickness is formed on the device area of the substrate, so as to form an electronic device. A second polysilicon film of a second thickness is formed on the ESD protection circuit area, so as to form an ESD protection device. The second thickness, which is preferably about in the range of 100 to 500 nanometers, is thicker than the first thickness.
申请公布号 US2006231896(A1) 申请公布日期 2006.10.19
申请号 US20060451344 申请日期 2006.06.13
申请人 KER MING-DOU;DENG CHIH-KANG;TSENG TANG-KUI;SHIH AN;YANG SHENG-CHIEH 发明人 KER MING-DOU;DENG CHIH-KANG;TSENG TANG-KUI;SHIH AN;YANG SHENG-CHIEH
分类号 H01L23/62;H01L21/77;H01L23/60;H01L27/02;H01L27/12;H01L29/06 主分类号 H01L23/62
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