| 摘要 |
PROBLEM TO BE SOLVED: To suppress loss of light at a groove part of an optical waveguide having an insertion groove into which a thin-film functional element is inserted. SOLUTION: The optical waveguide 1A has a waveguide layer 2A having a core 4, an underclad 4a, and an overclad 4b. The waveguide layer 2A has the stepped insertion groove 6A into which the thin-film functional element is inserted where the stepped insertion groove crosses an intersection of two cores 4. The stepped insertion groove 6A has a shallow groove portion 8 which has a bottom part 8a at the same height with bottom surfaces of the cores 4 and also has a core end surface 7 exposed to a wall portion of the stepped insertion groove 6A and a deep groove portion 9 formed by recessing the bottom portion 8a of the shallow groove portion 8 sideward apart from one side wall of a core end surface 7. COPYRIGHT: (C)2007,JPO&INPIT |
