SCANNING PROBE MICROSCOPE, MEASURING METHOD OF SURFACE CONTOUR OF SAMPLE AND PROBE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of measuring a three-dimensional shape with high precision by providing a simply constituted detection mechanism. SOLUTION: The scanning probe microscope 10 is equipped with an XY sample stage 14, the cantilever 16 supported on a scanning mechanism 22 in a cantilevered state at its one end and having a probe 24 fixed to its opened other end, a scanning mechanism 22 equipped with piezoelectric elements 18X, 18Y and 18Z which move the cantilever 16 in X-, Y- and Z-directions and a scanning control circuit 20. Further, an exciting piezoelectric element 28 driving by the high frequency signal from an oscillator 26 to excite the cantilever 16 is fixed on the support side of the cantilever 16 in a cantilevered state and a strain resistance element 30 being a self-detection type sensor is embedded in the cantilever 16. COPYRIGHT: (C)2007,JPO&INPIT