| 摘要 |
PROBLEM TO BE SOLVED: To detect the floating of a peripheral part of a liquid crystal panel from a work table, without having to install a floating detection mechanism that is different from the work table, when a negative pressure suction system is not used. SOLUTION: A panel floating sensor apparatus 68 detects that a vertical distance between the upper surface of a panel receiver 44 of the work table 40 and the lower surface of the peripheral part of the liquid crystal panel 10 has become a prescribed value and smaller. The panel floating sensor apparatus 68 is provided with a sensor dog 118 made to oscillate about a horizontal rotary shaft 128. The sensor dog 118 is provided with a panel contact part 130, projected from the upper surface of the panel receiver 44 and a light-shielding part 132. When the liquid panel 10 is set without floating from the panel receiver 44, the liquid crystal panel 10 oscillates the sensor dog 118 and the light-shielding part 132 shields the light from a photocoupler 148. COPYRIGHT: (C)2007,JPO&INPIT
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