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发明名称
Belichtungssystem mit einem parallelen Verbindungsmechanismus und Belichtungsverfahren
摘要
申请公布号
DE69930398(T2)
申请公布日期
2006.10.19
申请号
DE19996030398T
申请日期
1999.09.20
申请人
NIKON CORP.
发明人
TANAKA, KEIICHI
分类号
H01L21/027;G03F7/20;G03F7/22;H01J37/20
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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