| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric thin-film element which has no crack during producing, has a high piezoelectric distortion constant and has good adhesion with a lower electrode, and to provide an ink jet recording head employing this piezoelectric thin-film element and enables high-definition printing. <P>SOLUTION: The piezoelectric thin-film element is provided with a piezoelectric thin film consisting of a polycrystalline substance, and upper and lower electrodes arranged with the piezoelectric film sandwiched. In this element, the lower electrode is made of a compound of platinum and an oxide of a metal element being a constituent of the piezoelectric film. <P>COPYRIGHT: (C)2007,JPO&INPIT |
