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发明名称
ACTUATOR ARRANGEMENT FOR ACTIVE VIBRATION ISOLATION USING A PAYLOAD AS AN INERTIAL REFERENCE MASS
摘要
申请公布号
EP1711724(A1)
申请公布日期
2006.10.18
申请号
EP20050702670
申请日期
2005.01.14
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.
发明人
WARMERDAM, THOMAS, P., H.;VERVOORDELDONK, MICHAEL, J.
分类号
F16F15/027;B60G17/015;F16F15/03;G03F7/20
主分类号
F16F15/027
代理机构
代理人
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