发明名称 |
DIAMOND SHELLS FABRICATED BY USING POROUS PARTICLES AND FABRICATION METHOD THEREOF |
摘要 |
<p>A hollow diamond shell with a size of a few micrometer to hundreds of micrometer and having a geometrical shape and its fabrication method are disclosed. A diamond film is deposited by a CVD method and porous grits are used as a victim substrate to be etched later, so that the substrate can be easily removed by a capillary phenomenon that an etching solution can be intensively absorbed in a substrate etching process. Thus, a perfect diamond shell with only a plurality of fine pores with a nano size without any conspicuous opening can be obtained. Also, a diamond shell with a small opening of below 10 percent of the surface area of grits can be fabricated by controlling a nuclear generation of diamond particles.</p> |
申请公布号 |
KR20060108440(A) |
申请公布日期 |
2006.10.18 |
申请号 |
KR20050030824 |
申请日期 |
2005.04.13 |
申请人 |
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
LEE, JAE KAP;JOHN PHILLIP |
分类号 |
C23C16/27;C03C17/00 |
主分类号 |
C23C16/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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