发明名称 DIAMOND SHELLS FABRICATED BY USING POROUS PARTICLES AND FABRICATION METHOD THEREOF
摘要 <p>A hollow diamond shell with a size of a few micrometer to hundreds of micrometer and having a geometrical shape and its fabrication method are disclosed. A diamond film is deposited by a CVD method and porous grits are used as a victim substrate to be etched later, so that the substrate can be easily removed by a capillary phenomenon that an etching solution can be intensively absorbed in a substrate etching process. Thus, a perfect diamond shell with only a plurality of fine pores with a nano size without any conspicuous opening can be obtained. Also, a diamond shell with a small opening of below 10 percent of the surface area of grits can be fabricated by controlling a nuclear generation of diamond particles.</p>
申请公布号 KR20060108440(A) 申请公布日期 2006.10.18
申请号 KR20050030824 申请日期 2005.04.13
申请人 KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 LEE, JAE KAP;JOHN PHILLIP
分类号 C23C16/27;C03C17/00 主分类号 C23C16/27
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