| 发明名称 |
Metal-containing compound purification |
| 摘要 |
A process of purifying metal-containing compounds employing continuous extraction is provided. The metal-containing compounds are provided in high purity and are suitable for use in depositing metal films, particularly thin metal films used in electronic devices. |
| 申请公布号 |
EP1712656(A1) |
申请公布日期 |
2006.10.18 |
| 申请号 |
EP20060252003 |
申请日期 |
2006.04.11 |
| 申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C. |
发明人 |
SHENAI-KHATKHATE, DEODATTA VINAYAK;POWER, MICHAEL B. |
| 分类号 |
C23C16/44;C23C16/18 |
主分类号 |
C23C16/44 |
| 代理机构 |
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