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发明名称
Method of forming a titanium nitride layer and apparatus for performing the same
摘要
申请公布号
KR100636037(B1)
申请公布日期
2006.10.18
申请号
KR20040094980
申请日期
2004.11.19
申请人
发明人
分类号
H01L21/318;H01L21/20
主分类号
H01L21/318
代理机构
代理人
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