| 发明名称 |
Edge and bevel cleaning process and system |
| 摘要 |
The present invention provides at least one nozzle that sprays a rotating workpiece with an etchant at an edge thereof. The at least one nozzle is located in an upper chamber of a vertically configured processing subsystem that also includes mechanisms for plating, cleaning and drying in upper and lower chambers.
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| 申请公布号 |
US7122473(B2) |
申请公布日期 |
2006.10.17 |
| 申请号 |
US20040920028 |
申请日期 |
2004.08.16 |
| 申请人 |
ASM NUTOOL, INC. |
发明人 |
ASHJAEE JALAL;VOLODARSKY RIMMA;UZOH CYPRIAN E.;BASOL BULENT M.;TALIEH HOMAYOUN |
| 分类号 |
H01L21/445;H01L21/00;H01L21/288;H01L21/3213 |
主分类号 |
H01L21/445 |
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