Electron emitters for lithography tools,申请号KR20000023964-传众专利搜索

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发明名称	Electron emitters for lithography tools
摘要
申请公布号	KR100634727(B1)	申请公布日期	2006.10.17
申请号	KR20000023964	申请日期	2000.05.04
申请人		发明人
分类号	G03F7/20;H01J37/065;H01J37/305;H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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