SUBSTRAT-REINIGUNGSVERFAHREN, SUBSTRAT-REINIGUNGSVORRICHTUNG UND COMPUTER-LESBARES AUFZEICHNUNGSMEDIUM,申请号AT20040009399-传众专利搜索

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发明名称	SUBSTRAT-REINIGUNGSVERFAHREN, SUBSTRAT-REINIGUNGSVORRICHTUNG UND COMPUTER-LESBARES AUFZEICHNUNGSMEDIUM
摘要
申请公布号	AT501653(A2)	申请公布日期	2006.10.15
申请号	AT20040009399	申请日期	2004.11.12
申请人	TOKYO ELECTRON LIMITED	发明人
分类号	B08B3/02;G11B23/50;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):H01L21/304	主分类号	B08B3/02
代理机构		代理人
主权项
地址

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