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发明名称
Chemically amplified resist composition
摘要
申请公布号
KR100632714(B1)
申请公布日期
2006.10.13
申请号
KR19997011567
申请日期
1999.12.08
申请人
发明人
分类号
G03F7/004
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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