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经营范围
发明名称
Substrate Inspection Apparatus
摘要
申请公布号
KR100634652(B1)
申请公布日期
2006.10.13
申请号
KR20047006299
申请日期
2002.11.05
申请人
发明人
分类号
G02F1/13;G01N21/956
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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