| 摘要 |
A frequency control circuit (45) controls oscillation frequency of a second high-frequency power source according to a phase difference between the voltage component and the current component measured by a phase difference sensor (41) and an input impedance to an impedance matching device (34) measured by an impedance sensor (42). An amplitude control circuit (44) controls the high- frequency power output by the second high-frequency power source (51) according to the power (effective power) supplied to the impedance matching device (34) side and measured by a power sensor (40).
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