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发明名称
SEMICONDUCTOR WAFER CHUCK APPARATUS AND CONNECTOR USED THEREIN
摘要
申请公布号
KR100633978(B1)
申请公布日期
2006.10.13
申请号
KR19990057456
申请日期
1999.12.14
申请人
发明人
分类号
H01L21/68;H01L21/683;H01R13/05;H02N13/00
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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