| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently regenerate a polishing face by easily and surely flattening irregularity on the polishing face even of there is the irregularity on the polishing face. <P>SOLUTION: This dressing device has a dresser 36 for dressing the polishing face 16a of a polishing table 10 relatively sliding on the polished face of polished materials to polish the polished face in a flat and mirror manner. This device has sensors 44a, 44b each directly and indirectly sensing an abrasion load acting between the polishing face 16a and the dresser 36 at the time of dressing the polishing face 16a, and determination means 46, 48 each determining a dressing progressing status according to outputs of the sensors 44a, 44b. <P>COPYRIGHT: (C)2007,JPO&INPIT |
