| 摘要 |
PROBLEM TO BE SOLVED: To obtain a small magnetic sensor for detecting the strength of magnetic fields in three axial directions by arranging three or more giant magnetrostrictive elements on one substrate. SOLUTION: On the flat surface of a thick film formed on a substrate 1, four GMR elements 2a-2d constituting an X-axis sensor and four GMR elements 3e-3h constituting an Y-axis sensor are arranged. A Z-axis sensor is constituted of four GMR elements 4i-4l formed on bevels of a plurality of grooves formed by etching a part of the thick film. COPYRIGHT: (C)2007,JPO&INPIT
|
