| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxide-based laminated thin film in which a heterogeneous phase whose difference in refractive index is large can be formed into desired shape with satisfactory accuracy and with which the miniaturizing of an optical device can be attained, and a method for manufacturing the same and an optical device. SOLUTION: The oxide system laminated thin film is a laminated thin film in which two or more layers of a metal oxide film 1 and a metal film 2 are laminated and it is characterized in that the metal film 2 consists of metallic material whose standard electrode potential is lower than that of metallic material constituting the metal oxide film 1, and a heterogeneous phase 3 whose refractive index is different from that of the non-irradiation part of a short pulse laser is formed in the inside of the laminated thin film by the induction of a converged short pulse laser 5. COPYRIGHT: (C)2007,JPO&INPIT |
