发明名称 SURFACE MODIFYING METHOD USING ION BEAM
摘要 PROBLEM TO BE SOLVED: To accelerate the growth of a bio-material or organic material such as apatite or the like on the surface of a solid by irradiating the surface of the solid such as a metal, a semiconductor, an insulating material, organic matter or the like with a cluster ion beam to perform the surface modification of the solid to apply super-hydrophilicity to the surface of the solid. SOLUTION: The surface of the solid is irradiated with a water cluster ion beam, an oxygen cluster ion beam or a monomer cluster ion beam accelerated by predetermined accelerated voltage to impart super-hydrophilicity of a contact angle of 15°or above to the surface of the solid. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006272076(A) 申请公布日期 2006.10.12
申请号 JP20050092499 申请日期 2005.03.28
申请人 SEINAN KOGYO KK 发明人 TAKAOKA YOSHIHIRO
分类号 B01J19/12;H01J37/317;H01L21/304 主分类号 B01J19/12
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