| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a failure detection system capable of avoiding the erroneous detection of a failure of a treatment apparatus and preventing throughput from lowering owing to the erroneous detection. <P>SOLUTION: The system comprises detection means 11 for detecting the presence of a failure of the treatment apparatus using at least any of basic algorithm and temporary algorithm different from the basic algorithm; a temporary treatment control means 12 for making the detection means 11 use the temporary algorithm when the maintenance work of the treatment apparatus is implemented; and basic treatment control means 13 for making the detection means 11 use the basic algorithm, on the basis of adjusting conditions under which the use of the basic and temporary algorithms is adjusted. <P>COPYRIGHT: (C)2007,JPO&INPIT |
