| 摘要 |
PROBLEM TO BE SOLVED: To enable to continuously obtain an excellent cleaning performance by remarkably reducing the usage amount of sulfuric acid, and to accurately grasp the degree of cleaning of a cleaning object. SOLUTION: This system is provided with a cleaning apparatus 1 for cleaning the cleaning object using a persulfuric acid solution as a cleaning liquid, electrolytic reaction apparatuses 10a, 10b, 14 and 15 for regenerating the persulfuric acid solution by an electrolytic reaction, circulation lines 4, 6 for circulating the persulfuric acid solution between the cleaning apparatus and the electrolytic reaction apparatus, and a conductivity measuring device for determining the conductivity of the solution. The degree of cleaning of the cleaning object is determined based on a change in conductivity of the solution. The degree of cleaning is accurately gasped by utilizing the relevance between the concentration of a solute matter in the solution to be generated in cleaning and the conductivity of the solution. Thus, the cleaning can be efficiently performed, and the cleaning is positively performed and high cleanliness can be maintained. COPYRIGHT: (C)2007,JPO&INPIT
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