发明名称 |
DEVICE, CARBON NANO WALL, AND ITS MANUFACTURING METHOD |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new device using a new carbon structure having a nano scale, and to provide a carbon nano wall and a manufacturing method of the carbon nano wall. <P>SOLUTION: In the device, a conductive region is formed with the carbon nano wall as a substrate. The carbon nano wall can comprise a hetero atom or does not comprise the hetero atom. In the carbon nano wall comprising the hetero atom, material gas comprising the hetero atom and a carbon source can be manufactured by a plasma CVD method. <P>COPYRIGHT: (C)2007,JPO&INPIT |
申请公布号 |
JP2006278586(A) |
申请公布日期 |
2006.10.12 |
申请号 |
JP20050093311 |
申请日期 |
2005.03.28 |
申请人 |
TOYOTA MOTOR CORP;HORI MASARU;HIRAMATSU MINEO |
发明人 |
HORI MASARU;HIRAMATSU MINEO;KANO HIROYUKI;SUGIYAMA TORU |
分类号 |
H01L29/06;B82B1/00;B82B3/00;C01B31/02;H01L21/205;H01L21/8242;H01L27/108;H01L29/66;H01L29/78;H01L29/786;H01L29/80 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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