| 摘要 |
PROBLEM TO BE SOLVED: To provide a general-purpose flow controller controlling a flow rate passing a plurality of flow control members halfway along a feeding flow passage to a prescribed flow rate in time of installation (construction) of a fluid feeding facility, thereafter uninstalled from the fluid feeding facility, to be reused for the control of another facility after the construction. SOLUTION: In this flow controller, each of the flow control members 4A-4F is installed with a flow control unit 21. The unit 21 has: an operation device 24 attachable/detachable to/from an operation part 13 of the flow control member; and an operation force detection means 25 detecting operation force of the operation part. A controller 27 inputs data from a flow rate detector 23 temporarily installed inside a duct downstream or upstream of the flow control member, or the operation force of the operation part detected by the operation force detection means to a storage part, outputs an opening/closing amount change value of airflow control vanes 11a, 11b to the operation device, and controls the flow rate flowing through each the flow control member to a prescribed flow rate value and a target flow rate within an allowable range thereof when changing or controlling the flow rate after the fluid feeding facility installation. COPYRIGHT: (C)2007,JPO&INPIT
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