| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve resistance to the high-temperature water of 80°C concerning an optical semi-transmission film which is optically designed using nitrogen, metal, and silicon as main components. <P>SOLUTION: In a phase shift mask blank, an optical semi-transmission film which has a predetermined transmission to an exposure wavelength, and is optically designed using nitrogen, metal, and silicon as main components is formed on a transparent substrate. The phase shift mask blank contains oxygen in the optical semi-transmission film composed mainly of nitrogen, metal, and silicon within the range of maintaining the optical characteristics of the optical design using nitrogen, metal, and silicon as main components, and has achieved an improved resistance to high-temperature water of the optical semi-transmission film composed mainly of nitrogen, metal and silicon. <P>COPYRIGHT: (C)2007,JPO&INPIT |
