CANTILEVER-TYPE SENSOR

摘要

A cantilever-type sensor includes a cantilever, an actuator for oscillating the cantilever, a sensor provided at the cantilever so as to detect oscillating conditions of the cantilever, a control unit for controlling the actuator to cause the actuator to pulse-oscillate the cantilever, and a measurement unit for measuring a physical quantity of an object based on a variation of a pulse response detected by the sensor.