发明名称 METHOD FOR MANUFACTURING CARBON NANOTUBE AND METHOD FOR MANUFACTURING TRANSISTOR
摘要 PROBLEM TO BE SOLVED: To easily provide a semiconductive carbon nanotube having a desired characteristic. SOLUTION: Metallic carbon nanotubes 103a, 103b and 103c and a semiconductive carbon nanotube 104 are formed in a mixed state among metal electrodes 102 arranged on a substrate 101. Then, an electron beam is irradiated to the carbon nanotubes 103a and 103b in the semiconductive state and the carbon nanotube 104 with a semiconductor characteristic to be changed. In this case, the given electron beam may be set to 1 kV of accelration voltage and 1×10<SP>-2</SP>or less of quantity of radiation, for example. Thus, the semiconductive carbon nanotubes 113a and 113b and the carbon nanotube 114 with a changed semiconductive characteristic can be obtained by the irradiation of the electron beam. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006278505(A) 申请公布日期 2006.10.12
申请号 JP20050092444 申请日期 2005.03.28
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 KANZAKI KENICHI;SUZUKI SATORU;KOBAYASHI YOSHIHIRO;INOKAWA HIROSHI;ONO YUKINORI
分类号 H01L29/786;B82B3/00;C01B31/02;H01L21/336;H01L29/06 主分类号 H01L29/786
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