| 摘要 |
An apparatus ( 10 ) for positioning a device ( 228 ) includes a stage assembly ( 218 ) and a first transfer device ( 268 A). The stage assembly ( 218 ) positions the device ( 228 ) and includes a device stage ( 250 ) that retains the device ( 228 ). The stage assembly ( 218 ) positions the device ( 228 ) in a work area ( 238 ) and a transfer area ( 240 ). The transfer device ( 268 A) transfers a first utility to or from the device stage ( 250 ) in a non-contact fashion when the device stage ( 250 ) is in the transfer area ( 240 ) and does not transfer the first utility to or from the device stage ( 250 ) when the device stage ( 250 ) is in the work area ( 238 ). The first utility can be electrical power and/or electrical signals. Additionally, the apparatus ( 10 ) can include a loader ( 242 ) that loads the device ( 228 ) onto the device stage ( 250 ) when the device stage ( 250 ) is in the transfer area ( 240 ).
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