发明名称 Method for fabricating polycrystalline silicon thin film transistor
摘要 A thin film transistor device includes a substrate, a buffer layer on the substrate, an active layer on the buffer layer, the active layer is formed of polycrystalline silicon and includes first undoped areas, a second lightly doped area, and third highly doped areas, a gate insulation layer on the buffer layer, a dual-gate electrode on the gate insulation layer including first and second gate electrodes corresponding to the first areas, an interlayer insulator on the gate insulation layer covering the dual-gate electrode, source and drain contact holes exposing the third areas, a gate contact hole penetrating the interlayer insulator to expose a portion of the dual-gate electrode, source and drain electrodes on the interlayer insulator contacting the third areas through the source and drain contact holes, and a third gate electrode on the interlayer insulator contacting the exposed portion of the dual-gate electrode through the gate contact hole.
申请公布号 US7118944(B2) 申请公布日期 2006.10.10
申请号 US20050247202 申请日期 2005.10.12
申请人 LG.PHILIPS LCD CO., LTD. 发明人 CHUNG HOON-JU
分类号 H01L21/00;H01L21/336;H01L21/44;H01L21/77;H01L21/84;H01L27/12;H01L29/786 主分类号 H01L21/00
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