发明名称 Mounting device and method thereof
摘要 A mounting device and a method thereof for preventing a pellet from cracking or chipping when the pellet is mounted. A mounting device comprises a first head for mounting a second pellet on a first pellet already mounted and temporarily pressure-bonding the second pellet thereto by applying a first load and a second head for pressure-bonding the second pellet, which has been temporarily pressure-bonded by the first head, to the first pellet by applying a second load higher than the first load. The second head includes a protective sheet which is moved so that the unused portion is set with respect to each pellet, a ball which is supported rollably in arbitrary directions and in contact with the second pellet through the protective sheet, a spring for applying an elastic force in the direction of the protective sheet and applying the second load to the second pellet through the protective sheet, and a drive for rolling the ball on the protective sheet in contact with the second pellet.
申请公布号 US7117913(B2) 申请公布日期 2006.10.10
申请号 US20040017653 申请日期 2004.12.22
申请人 ELPIDA MEMORY, INC. 发明人 SASAKI JUN
分类号 B32B37/10;H01L21/52;B32B41/00;H01L21/00;H01L21/98;H01L25/065 主分类号 B32B37/10
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