| 摘要 |
PROBLEM TO BE SOLVED: To perform defect inspection with high reliability, while processing at high compression rate and high speed, and making missing of defective pixel difficult to occur. SOLUTION: A set of data corresponding to a plurality of pixels in a prescribed section S is compressed to one data 1a3 for the display characteristic data 1a2 of each pixel, and the each compressed data 1a3 is handled as a compression image data D1, and the like arranged according to the position of corresponding compression element. The compression image data D1 is obtained for each shift conditions to a plurality of positions satisfying the conditions that a part of pixels in same section S exists, while being overlapped at a position for specifying the section S to be compressed. Corresponding compression data 1a3 of the compression image data D1-D4 under each shift conditions are combined into one compression data 1a4 to be judged which is then compared with a reference data thus detecting defects. |
