| 摘要 |
PROBLEM TO BE SOLVED: To rapidly and securely clean the inside of a clean room without producing stagnation of air in any parts around the outlet of a filter unit. SOLUTION: Nuts are fixedly mounted on flanges 5e provide at four corners of an outlet 5d of a filter unit 5, into each of which nut a suspension screw 2 is inserted, and a coil spring 2c is concentrically mounted in the course of the suspension screw 2, and further a distributing plate 1 is suspended and held at a predetermined height at four corners thereof with the four suspension screws 2, through which plate innumerable ventilating holes (b) are drilled. Clean air is exhausted from the ventilating holes (b) toward a floor surface, and hence clean air is exhausted from between a ceiling surface 4d and an outer periphery entire edge of the plate 1 along the ceiling surface 4d in the direction of 360 degrees. |
