发明名称 |
PHOTOSENSITIVE POLYMER COMPOSITION, PROCESS FOR PRODUCING PATTERN, AND ELECTRONIC PART |
摘要 |
<p>A photosensitive polymer composition includes (a) a polyamide having a repeating unit represented by the following general formula (I):
wherein U represents a tetravalent organic group, V represents a bivalent organic group and p is an integer representing a number of the repeating unit; (b) a compound which generates an acid upon receiving light; and (c) a compound represented by the following general formula (II):
wherein m and n are each independently integer of 1 or 2, Rs are each independently hydrogen, alkyl group or acyl group, and R 1 and R 2 each independently represents fluoroalkyl group having 1 to 3 carbon atoms.</p> |
申请公布号 |
EP1708026(A1) |
申请公布日期 |
2006.10.04 |
申请号 |
EP20040807191 |
申请日期 |
2004.12.16 |
申请人 |
HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD. |
发明人 |
OOE, MASAYUKI;KOMATSU, HIROSHI;TSUMARU, YOSHIKO;KAWASAKI, DAI;KATOU, KOUJI;UENO, TAKUMI |
分类号 |
G03F7/022;C08G69/26;C08K5/03;C08K5/13;C08L77/06;G03F7/004;G03F7/023;G03F7/037;G03F7/039;G03F7/40;H01L21/027 |
主分类号 |
G03F7/022 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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