发明名称 PHOTOSENSITIVE POLYMER COMPOSITION, PROCESS FOR PRODUCING PATTERN, AND ELECTRONIC PART
摘要 <p>A photosensitive polymer composition includes (a) a polyamide having a repeating unit represented by the following general formula (I): wherein U represents a tetravalent organic group, V represents a bivalent organic group and p is an integer representing a number of the repeating unit; (b) a compound which generates an acid upon receiving light; and (c) a compound represented by the following general formula (II): wherein m and n are each independently integer of 1 or 2, Rs are each independently hydrogen, alkyl group or acyl group, and R 1 and R 2 each independently represents fluoroalkyl group having 1 to 3 carbon atoms.</p>
申请公布号 EP1708026(A1) 申请公布日期 2006.10.04
申请号 EP20040807191 申请日期 2004.12.16
申请人 HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD. 发明人 OOE, MASAYUKI;KOMATSU, HIROSHI;TSUMARU, YOSHIKO;KAWASAKI, DAI;KATOU, KOUJI;UENO, TAKUMI
分类号 G03F7/022;C08G69/26;C08K5/03;C08K5/13;C08L77/06;G03F7/004;G03F7/023;G03F7/037;G03F7/039;G03F7/40;H01L21/027 主分类号 G03F7/022
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