| 发明名称 |
Microelectromechanical system pressure sensor and method for making and using |
| 摘要 |
According to some embodiments, an apparatus includes a substrate that defines a plane. The apparatus also includes a first conducting plate that is substantially normal to the substrate and a second conducting plate that is (i) substantially normal to the substrate and (ii) deformable in response to a pressure.
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| 申请公布号 |
US7114397(B2) |
申请公布日期 |
2006.10.03 |
| 申请号 |
US20040799053 |
申请日期 |
2004.03.12 |
| 申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
FORTIN JEFFREY;KISHORE KUNA;SUBRAMANIAN KANAKASABAPATHI |
| 分类号 |
H04R17/00;G01L1/14;G01L9/00 |
主分类号 |
H04R17/00 |
| 代理机构 |
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代理人 |
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