发明名称 |
Probe for scanning probe lithography and making method thereof |
摘要 |
A probe of scanning probe lithography which provides a long time of useful life. The probe has a tip part comprising a conductor and an insulator, the insulator is formed to cover the conductor, and the conductor is formed to provide a substantially uniform cross-sectional configuration with respect to a surface to be patterned through scanning.
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申请公布号 |
US7115863(B1) |
申请公布日期 |
2006.10.03 |
申请号 |
US20000616076 |
申请日期 |
2000.07.13 |
申请人 |
HITACHI, LTD. |
发明人 |
ISHIBASHI MASAYOSHI;HASHIZUME TOMIHIRO;KAJIYAMA HIROSHI |
分类号 |
B81B3/00;H01J37/00;B81C1/00;G01Q60/38;G01Q60/40;G01Q70/10;G01Q70/14;G01Q80/00;G03F7/20;H01L21/027 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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