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发明名称
THIN FILM FORMING APPARATUS AND TUNGSTEN NITRIDE THIN FILM FORMING METHOD
摘要
申请公布号
KR100630647(B1)
申请公布日期
2006.10.02
申请号
KR19990062682
申请日期
1999.12.27
申请人
发明人
分类号
H01L21/20;C23C16/34;C23C16/44;C23C16/455;H01L21/28;H01L21/285
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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