发明名称 |
Method, program product and apparatus for optimizing illumination for full-chip layer |
摘要 |
Optimization of illumination for a full- chip layer is disclosed. A pitch frequency of the full-chip layer is determined so as to generate a pitch frequency histogram of the full-chip layer. The pitch frequency indicates how often a given pitch occurs in the full-chip layer. The pitch frequency histogram is equated to be the first eigenfunction from the sum of coherent system representation of a transformation cross coefficient. An integral equation for the first eigenfunction of the transformation cross coefficient is solved so as to define the optimal illumination for imaging the full- chip layer. |
申请公布号 |
SG125232(A1) |
申请公布日期 |
2006.09.29 |
申请号 |
SG20060001144 |
申请日期 |
2006.02.21 |
申请人 |
ASML MASKTOOLS, B.V. |
发明人 |
SOCHA ROBERT;CHEN JANG FUNG |
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