发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device and its manufacturing method capable of lowering an effect of a pollution caused by a heavy metal and lowering a leakage current. <P>SOLUTION: The semiconductor device 1 comprises an n-type semiconductor region 4 formed in a semiconductor substrate, a p-type semiconductor region 3 formed in a position deeper than the region 4 from the surface of the semiconductor substrate, and a heavy-metal-capturing region 5 formed in a part of the region 3. The region 5 is formed so that the diffusion velocity of the heavy metal is slower than that of the region 5 comparing to the region 3. For instance, the region 5 has a boron layer doped by the boron. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006261452(A) 申请公布日期 2006.09.28
申请号 JP20050077977 申请日期 2005.03.17
申请人 ELPIDA MEMORY INC 发明人 OYU SHIZUNORI;HAMADA KOJI;UCHIYAMA YASUHIRO;HISA MITSUO
分类号 H01L21/322 主分类号 H01L21/322
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